Item Detail Information
Materials and processes for next generation lithography
e-Book
Materials and processes for next generation lithography
Copies
0 Total copies, 0 Copies are in, 0 Copies are out.
  • Share It:
  • Pinterest
Title
Materials and processes for next generation lithography
Call No
763
Digital Link
Click to View
Authors
Robinson, Alex
Lawson, Richard
Subjects
Lithography.
Language
English
Published
Amsterdam, [Netherlands] ; Oxford, [England] ; Cambridge, Massachusetts : Elsevier, 2016.
Publication Desc
1 online resource (636 pages) : illustrations.
ISBN
9780081003589 (e-book)
Series
Frontiers of nanoscience Volume 11.
Frontiers of Nanoscience Volume 11