e-Book
|
Title
Plasma etching processes for interconnect realization in VLSI
Call No
621.395
Digital Link
Authors
Subjects
Language
English
Published
London, [England] ; Oxford, [England] : ISTE Press : Elsevier, 2015.
Publication Desc
1 online resource (123 pages) : illustrations.
ISBN
9780081005903 (e-book)