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Handbook of thin film deposition : techniques, processes, and technologies
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Handbook of thin film deposition : techniques, processes, and technologies
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Title
Handbook of thin film deposition : techniques, processes, and technologies
Edition
3rd ed.
Digital Link
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Authors
Seshan, Krishna
ProQuest (Firm)
Subjects
Thin film devices--Design and construction--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.
Chemical vapor deposition--Handbooks, manuals, etc.
Language
English
Published
Waltham [Mass.] : William Andrew, 2012.
Publication Desc
xviii, 392 p. : ill. (some col.).