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Reliability of MEMS : testing of materials and devices

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Title

Reliability of MEMS : testing of materials and devices

Call No

539.60113

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Authors

Tabata, Osamu
Tsuchiya, Toshiyuki
ProQuest (Firm)

Subjects

Microelectromechanical systems--Reliability.

Language

English

Published

Weinheim : Wiley-VCH, 2013.

Publication Desc

xx, 303 p. : ill.

Series

Advanced micro & nanosystems. Advanced micro & nanosystems

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