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Enabling technologies for MEMS and nanodevices : advanced micro and nanosystems

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Title

Enabling technologies for MEMS and nanodevices : advanced micro and nanosystems

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Authors

Baltes, Henry
ProQuest (Firm)

Subjects

Microelectronics.
Nanotechnology.
Microelectromechanical systems.

Language

English

Published

Weinheim [Germany] : Wiley, 2013.

Publication Desc

xii, 427 p. : ill.

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